Linear plasma source for inline pre-treatment of vacuum-based roll-to-roll coating

Pre-treatment of films, foils, textiles, as well as other flat substrates
For application in vapour deposition plants, sputter plants, particularly in roll-coaters
Operational range from 0,1 Pa up to approx. 1,0 Pa
Effects of pre-treatment:
  • increase in layer adhesion,
  • optimised growth conditions results in best high layer quality,
  • increased permeation barrier.